diff --git a/lib/std/Io.zig b/lib/std/Io.zig
index 1afef86601..5796ee7eb0 100644
--- a/lib/std/Io.zig
+++ b/lib/std/Io.zig
@@ -676,6 +676,7 @@ pub const VTable = struct {
     dirDeleteFile: *const fn (?*anyopaque, Dir, []const u8) Dir.DeleteFileError!void,
     dirDeleteDir: *const fn (?*anyopaque, Dir, []const u8) Dir.DeleteDirError!void,
     dirRename: *const fn (?*anyopaque, old_dir: Dir, old_sub_path: []const u8, new_dir: Dir, new_sub_path: []const u8) Dir.RenameError!void,
+    dirRenamePreserve: *const fn (?*anyopaque, old_dir: Dir, old_sub_path: []const u8, new_dir: Dir, new_sub_path: []const u8) Dir.RenamePreserveError!void,
     dirSymLink: *const fn (?*anyopaque, Dir, target_path: []const u8, sym_link_path: []const u8, Dir.SymLinkFlags) Dir.SymLinkError!void,
     dirReadLink: *const fn (?*anyopaque, Dir, sub_path: []const u8, buffer: []u8) Dir.ReadLinkError!usize,
     dirSetOwner: *const fn (?*anyopaque, Dir, ?File.Uid, ?File.Gid) Dir.SetOwnerError!void,
diff --git a/lib/std/Io/Dir.zig b/lib/std/Io/Dir.zig
index e2f2440c8a..67d1ec849c 100644
--- a/lib/std/Io/Dir.zig
+++ b/lib/std/Io/Dir.zig
@@ -936,10 +936,9 @@ pub fn deleteDirAbsolute(io: Io, absolute_path: []const u8) DeleteDirError!void
 pub const RenameError = error{
     /// In WASI, this error may occur when the file descriptor does
     /// not hold the required rights to rename a resource by path relative to it.
-    ///
-    /// On Windows, this error may be returned instead of PathAlreadyExists when
-    /// renaming a directory over an existing directory.
     AccessDenied,
+    /// Attempted to replace a nonempty directory.
+    DirNotEmpty,
     PermissionDenied,
     FileBusy,
     DiskQuota,
@@ -950,9 +949,8 @@ pub const RenameError = error{
     NotDir,
     SystemResources,
     NoSpaceLeft,
-    PathAlreadyExists,
     ReadOnlyFileSystem,
-    RenameAcrossMountPoints,
+    CrossDevice,
     NoDevice,
     SharingViolation,
     PipeBusy,
@@ -964,6 +962,7 @@ pub const RenameError = error{
     /// intercepts file system operations and makes them significantly slower
     /// in addition to possibly failing with this error code.
     AntivirusInterference,
+    HardwareFailure,
 } || PathNameError || Io.Cancelable || Io.UnexpectedError;
 
 /// Change the name or location of a file or directory.
@@ -973,9 +972,9 @@ pub const RenameError = error{
 /// Renaming a file over an existing directory or a directory over an existing
 /// file will fail with `error.IsDir` or `error.NotDir`
 ///
-/// On Windows, both paths should be encoded as [WTF-8](https://wtf-8.codeberg.page/).
-/// On WASI, both paths should be encoded as valid UTF-8.
-/// On other platforms, both paths are an opaque sequence of bytes with no particular encoding.
+/// * On Windows, both paths should be encoded as [WTF-8](https://wtf-8.codeberg.page/).
+/// * On WASI, both paths should be encoded as valid UTF-8.
+/// * On other platforms, both paths are an opaque sequence of bytes with no particular encoding.
 pub fn rename(
     old_dir: Dir,
     old_sub_path: []const u8,
@@ -993,6 +992,39 @@ pub fn renameAbsolute(old_path: []const u8, new_path: []const u8, io: Io) Rename
     return io.vtable.dirRename(io.userdata, my_cwd, old_path, my_cwd, new_path);
 }
 
+pub const RenamePreserveError = error{
+    /// In WASI, this error may occur when the file descriptor does
+    /// not hold the required rights to rename a resource by path relative to it.
+    ///
+    /// On Windows, this error may be returned instead of PathAlreadyExists when
+    /// renaming a directory over an existing directory.
+    AccessDenied,
+    PathAlreadyExists,
+    /// Operating system or file system does not support atomic nonreplacing
+    /// rename.
+    OperationUnsupported,
+} || RenameError;
+
+/// Change the name or location of a file or directory.
+///
+/// If `new_sub_path` already exists, `error.PathAlreadyExists` will be returned.
+///
+/// Renaming a file over an existing directory or a directory over an existing
+/// file will fail with `error.IsDir` or `error.NotDir`
+///
+/// * On Windows, both paths should be encoded as [WTF-8](https://wtf-8.codeberg.page/).
+/// * On WASI, both paths should be encoded as valid UTF-8.
+/// * On other platforms, both paths are an opaque sequence of bytes with no particular encoding.
+pub fn renamePreserve(
+    old_dir: Dir,
+    old_sub_path: []const u8,
+    new_dir: Dir,
+    new_sub_path: []const u8,
+    io: Io,
+) RenamePreserveError!void {
+    return io.vtable.dirRenamePreserve(io.userdata, old_dir, old_sub_path, new_dir, new_sub_path);
+}
+
 pub const HardLinkOptions = File.HardLinkOptions;
 
 pub const HardLinkError = File.HardLinkError;
diff --git a/lib/std/Io/File.zig b/lib/std/Io/File.zig
index 389c8fb8b1..cf8ca4e638 100644
--- a/lib/std/Io/File.zig
+++ b/lib/std/Io/File.zig
@@ -726,7 +726,7 @@ pub const HardLinkError = error{
     SystemResources,
     NoSpaceLeft,
     ReadOnlyFileSystem,
-    NotSameFileSystem,
+    CrossDevice,
     NotDir,
 } || Io.Cancelable || Dir.PathNameError || Io.UnexpectedError;
 
diff --git a/lib/std/Io/File/Atomic.zig b/lib/std/Io/File/Atomic.zig
index 440430e04c..595aa2b08b 100644
--- a/lib/std/Io/File/Atomic.zig
+++ b/lib/std/Io/File/Atomic.zig
@@ -37,10 +37,14 @@ pub fn deinit(af: *Atomic, io: Io) void {
     af.* = undefined;
 }
 
-pub const LinkError = Dir.HardLinkError;
+pub const LinkError = Dir.HardLinkError || Dir.RenamePreserveError;
 
 /// Atomically materializes the file into place, failing with
 /// `error.PathAlreadyExists` if something already exists there.
+///
+/// If this operation could not be done with an unnamed temporary file, the
+/// named temporary file will be deleted in a following operation, which may
+/// independently fail. The result of that operation is stored in `delete_err`.
 pub fn link(af: *Atomic, io: Io) LinkError!void {
     if (af.file_exists) {
         if (af.file_open) {
@@ -48,8 +52,7 @@ pub fn link(af: *Atomic, io: Io) LinkError!void {
             af.file_open = false;
         }
         const tmp_sub_path = std.fmt.hex(af.file_basename_hex);
-        try af.dir.hardLink(&tmp_sub_path, af.dir, af.dest_sub_path, io, .{});
-        af.dir.deleteFile(io, &tmp_sub_path) catch {};
+        try af.dir.renamePreserve(&tmp_sub_path, af.dir, af.dest_sub_path, io);
         af.file_exists = false;
     } else {
         assert(af.file_open);
diff --git a/lib/std/Io/Threaded.zig b/lib/std/Io/Threaded.zig
index a6c3a623da..b8fcbfb70c 100644
--- a/lib/std/Io/Threaded.zig
+++ b/lib/std/Io/Threaded.zig
@@ -1442,6 +1442,7 @@ pub fn io(t: *Threaded) Io {
             .dirDeleteFile = dirDeleteFile,
             .dirDeleteDir = dirDeleteDir,
             .dirRename = dirRename,
+            .dirRenamePreserve = dirRenamePreserve,
             .dirSymLink = dirSymLink,
             .dirReadLink = dirReadLink,
             .dirSetOwner = dirSetOwner,
@@ -1593,6 +1594,7 @@ pub fn ioBasic(t: *Threaded) Io {
             .dirDeleteFile = dirDeleteFile,
             .dirDeleteDir = dirDeleteDir,
             .dirRename = dirRename,
+            .dirRenamePreserve = dirRenamePreserve,
             .dirSymLink = dirSymLink,
             .dirReadLink = dirReadLink,
             .dirSetOwner = dirSetOwner,
@@ -5283,7 +5285,7 @@ fn linkat(
             .NOTDIR => return syscall.fail(error.NotDir),
             .PERM => return syscall.fail(error.PermissionDenied),
             .ROFS => return syscall.fail(error.ReadOnlyFileSystem),
-            .XDEV => return syscall.fail(error.NotSameFileSystem),
+            .XDEV => return syscall.fail(error.CrossDevice),
             .ILSEQ => return syscall.fail(error.BadPathName),
             .FAULT => |err| return syscall.errnoBug(err),
             .INVAL => |err| return syscall.errnoBug(err),
@@ -5692,15 +5694,44 @@ fn dirRenameWindows(
     new_dir: Dir,
     new_sub_path: []const u8,
 ) Dir.RenameError!void {
-    const w = windows;
     const t: *Threaded = @ptrCast(@alignCast(userdata));
     _ = t;
+    return dirRenameWindowsInner(old_dir, old_sub_path, new_dir, new_sub_path, true) catch |err| switch (err) {
+        error.PathAlreadyExists => return error.Unexpected,
+        error.OperationUnsupported => return error.Unexpected,
+        else => |e| return e,
+    };
+}
 
+fn dirRenamePreserve(
+    userdata: ?*anyopaque,
+    old_dir: Dir,
+    old_sub_path: []const u8,
+    new_dir: Dir,
+    new_sub_path: []const u8,
+) Dir.RenamePreserveError!void {
+    const t: *Threaded = @ptrCast(@alignCast(userdata));
+    if (is_windows) return dirRenameWindowsInner(old_dir, old_sub_path, new_dir, new_sub_path, false);
+    if (native_os == .linux) return dirRenamePreserveLinux(old_dir, old_sub_path, new_dir, new_sub_path);
+    // Make a hard link then delete the original.
+    try dirHardLink(t, old_dir, old_sub_path, new_dir, new_sub_path, .{ .follow_symlinks = false });
+    const prev = swapCancelProtection(t, .blocked);
+    defer _ = swapCancelProtection(t, prev);
+    dirDeleteFile(t, old_dir, old_sub_path) catch {};
+}
+
+fn dirRenameWindowsInner(
+    old_dir: Dir,
+    old_sub_path: []const u8,
+    new_dir: Dir,
+    new_sub_path: []const u8,
+    replace_if_exists: bool,
+) Dir.RenamePreserveError!void {
+    const w = windows;
     const old_path_w_buf = try windows.sliceToPrefixedFileW(old_dir.handle, old_sub_path);
     const old_path_w = old_path_w_buf.span();
     const new_path_w_buf = try windows.sliceToPrefixedFileW(new_dir.handle, new_sub_path);
     const new_path_w = new_path_w_buf.span();
-    const replace_if_exists = true;
 
     const src_fd = src_fd: {
         const syscall: Syscall = try .start();
@@ -5802,9 +5833,9 @@ fn dirRenameWindows(
         .ACCESS_DENIED => return error.AccessDenied,
         .OBJECT_NAME_NOT_FOUND => return error.FileNotFound,
         .OBJECT_PATH_NOT_FOUND => return error.FileNotFound,
-        .NOT_SAME_DEVICE => return error.RenameAcrossMountPoints,
+        .NOT_SAME_DEVICE => return error.CrossDevice,
         .OBJECT_NAME_COLLISION => return error.PathAlreadyExists,
-        .DIRECTORY_NOT_EMPTY => return error.PathAlreadyExists,
+        .DIRECTORY_NOT_EMPTY => return error.DirNotEmpty,
         .FILE_IS_A_DIRECTORY => return error.IsDir,
         .NOT_A_DIRECTORY => return error.NotDir,
         else => return w.unexpectedStatus(rc),
@@ -5848,10 +5879,10 @@ fn dirRenameWasi(
                     .NOTDIR => return error.NotDir,
                     .NOMEM => return error.SystemResources,
                     .NOSPC => return error.NoSpaceLeft,
-                    .EXIST => return error.PathAlreadyExists,
-                    .NOTEMPTY => return error.PathAlreadyExists,
+                    .EXIST => return error.DirNotEmpty,
+                    .NOTEMPTY => return error.DirNotEmpty,
                     .ROFS => return error.ReadOnlyFileSystem,
-                    .XDEV => return error.RenameAcrossMountPoints,
+                    .XDEV => return error.CrossDevice,
                     .NOTCAPABLE => return error.AccessDenied,
                     .ILSEQ => return error.BadPathName,
                     else => |err| return posix.unexpectedErrno(err),
@@ -5877,9 +5908,105 @@ fn dirRenamePosix(
     const old_sub_path_posix = try pathToPosix(old_sub_path, &old_path_buffer);
     const new_sub_path_posix = try pathToPosix(new_sub_path, &new_path_buffer);
 
+    return renameat(old_dir.handle, old_sub_path_posix, new_dir.handle, new_sub_path_posix);
+}
+
+fn dirRenamePreserveLinux(
+    old_dir: Dir,
+    old_sub_path: []const u8,
+    new_dir: Dir,
+    new_sub_path: []const u8,
+) Dir.RenamePreserveError!void {
+    const linux = std.os.linux;
+
+    var old_path_buffer: [linux.PATH_MAX]u8 = undefined;
+    var new_path_buffer: [linux.PATH_MAX]u8 = undefined;
+
+    const old_sub_path_posix = try pathToPosix(old_sub_path, &old_path_buffer);
+    const new_sub_path_posix = try pathToPosix(new_sub_path, &new_path_buffer);
+
+    const syscall: Syscall = try .start();
+    while (true) switch (linux.errno(linux.renameat2(
+        old_dir.handle,
+        old_sub_path_posix,
+        new_dir.handle,
+        new_sub_path_posix,
+        .{ .NOREPLACE = true },
+    ))) {
+        .SUCCESS => return syscall.finish(),
+        .INTR => {
+            try syscall.checkCancel();
+            continue;
+        },
+        .ACCES => return syscall.fail(error.AccessDenied),
+        .PERM => return syscall.fail(error.PermissionDenied),
+        .BUSY => return syscall.fail(error.FileBusy),
+        .DQUOT => return syscall.fail(error.DiskQuota),
+        .ISDIR => return syscall.fail(error.IsDir),
+        .LOOP => return syscall.fail(error.SymLinkLoop),
+        .MLINK => return syscall.fail(error.LinkQuotaExceeded),
+        .NAMETOOLONG => return syscall.fail(error.NameTooLong),
+        .NOENT => return syscall.fail(error.FileNotFound),
+        .NOTDIR => return syscall.fail(error.NotDir),
+        .NOMEM => return syscall.fail(error.SystemResources),
+        .NOSPC => return syscall.fail(error.NoSpaceLeft),
+        .EXIST => return syscall.fail(error.PathAlreadyExists),
+        .NOTEMPTY => return syscall.fail(error.DirNotEmpty),
+        .ROFS => return syscall.fail(error.ReadOnlyFileSystem),
+        .XDEV => return syscall.fail(error.CrossDevice),
+        .ILSEQ => return syscall.fail(error.BadPathName),
+        .FAULT => |err| return syscall.errnoBug(err),
+        .INVAL => |err| return syscall.errnoBug(err),
+        else => |err| return syscall.unexpectedErrno(err),
+    };
+}
+
+fn renameat(
+    old_dir: posix.fd_t,
+    old_sub_path: [*:0]const u8,
+    new_dir: posix.fd_t,
+    new_sub_path: [*:0]const u8,
+) Dir.RenameError!void {
+    const syscall: Syscall = try .start();
+    while (true) switch (posix.errno(posix.system.renameat(old_dir, old_sub_path, new_dir, new_sub_path))) {
+        .SUCCESS => return syscall.finish(),
+        .INTR => {
+            try syscall.checkCancel();
+            continue;
+        },
+        .ACCES => return syscall.fail(error.AccessDenied),
+        .PERM => return syscall.fail(error.PermissionDenied),
+        .BUSY => return syscall.fail(error.FileBusy),
+        .DQUOT => return syscall.fail(error.DiskQuota),
+        .ISDIR => return syscall.fail(error.IsDir),
+        .IO => return syscall.fail(error.HardwareFailure),
+        .LOOP => return syscall.fail(error.SymLinkLoop),
+        .MLINK => return syscall.fail(error.LinkQuotaExceeded),
+        .NAMETOOLONG => return syscall.fail(error.NameTooLong),
+        .NOENT => return syscall.fail(error.FileNotFound),
+        .NOTDIR => return syscall.fail(error.NotDir),
+        .NOMEM => return syscall.fail(error.SystemResources),
+        .NOSPC => return syscall.fail(error.NoSpaceLeft),
+        .EXIST => return syscall.fail(error.DirNotEmpty),
+        .NOTEMPTY => return syscall.fail(error.DirNotEmpty),
+        .ROFS => return syscall.fail(error.ReadOnlyFileSystem),
+        .XDEV => return syscall.fail(error.CrossDevice),
+        .ILSEQ => return syscall.fail(error.BadPathName),
+        .FAULT => |err| return syscall.errnoBug(err),
+        .INVAL => |err| return syscall.errnoBug(err),
+        else => |err| return syscall.unexpectedErrno(err),
+    };
+}
+
+fn renameatPreserve(
+    old_dir: posix.fd_t,
+    old_sub_path: [*:0]const u8,
+    new_dir: posix.fd_t,
+    new_sub_path: [*:0]const u8,
+) Dir.RenameError!void {
     const syscall: Syscall = try .start();
     while (true) {
-        switch (posix.errno(posix.system.renameat(old_dir.handle, old_sub_path_posix, new_dir.handle, new_sub_path_posix))) {
+        switch (posix.errno(posix.system.renameat(old_dir, old_sub_path, new_dir, new_sub_path))) {
             .SUCCESS => return syscall.finish(),
             .INTR => {
                 try syscall.checkCancel();
@@ -5905,7 +6032,7 @@ fn dirRenamePosix(
                     .EXIST => return error.PathAlreadyExists,
                     .NOTEMPTY => return error.PathAlreadyExists,
                     .ROFS => return error.ReadOnlyFileSystem,
-                    .XDEV => return error.RenameAcrossMountPoints,
+                    .XDEV => return error.CrossDevice,
                     .ILSEQ => return error.BadPathName,
                     else => |err| return posix.unexpectedErrno(err),
                 }
@@ -7686,7 +7813,7 @@ fn dirHardLink(
                         .NOTDIR => return error.NotDir,
                         .PERM => return error.PermissionDenied,
                         .ROFS => return error.ReadOnlyFileSystem,
-                        .XDEV => return error.NotSameFileSystem,
+                        .XDEV => return error.CrossDevice,
                         .INVAL => |err| return errnoBug(err),
                         .ILSEQ => return error.BadPathName,
                         else => |err| return posix.unexpectedErrno(err),
diff --git a/lib/std/fs/test.zig b/lib/std/fs/test.zig
index d7d592ee36..a584fa3477 100644
--- a/lib/std/fs/test.zig
+++ b/lib/std/fs/test.zig
@@ -1022,8 +1022,7 @@ test "Dir.rename directory onto non-empty dir" {
             file.close(io);
             target_dir.close(io);
 
-            // Rename should fail with PathAlreadyExists if target_dir is non-empty
-            try expectError(error.PathAlreadyExists, ctx.dir.rename(test_dir_path, ctx.dir, target_dir_path, io));
+            try expectError(error.DirNotEmpty, ctx.dir.rename(test_dir_path, ctx.dir, target_dir_path, io));
 
             // Ensure the directory was not renamed
             var dir = try ctx.dir.openDir(io, test_dir_path, .{});
diff --git a/lib/std/os/linux.zig b/lib/std/os/linux.zig
index 812e07f7e8..92ea207fd0 100644
--- a/lib/std/os/linux.zig
+++ b/lib/std/os/linux.zig
@@ -501,6 +501,15 @@ pub const O = switch (native_arch) {
     else => @compileError("missing std.os.linux.O constants for this architecture"),
 };
 
+pub const RENAME = packed struct(u32) {
+    /// Cannot be set together with `EXCHANGE`.
+    NOREPLACE: bool = false,
+    /// Cannot be set together with `NOREPLACE`.
+    EXCHANGE: bool = false,
+    WHITEOUT: bool = false,
+    _: u29 = 0,
+};
+
 /// Set by startup code, used by `getauxval`.
 pub var elf_aux_maybe: ?[*]std.elf.Auxv = null;
 
@@ -1346,9 +1355,22 @@ pub fn rename(old: [*:0]const u8, new: [*:0]const u8) usize {
     if (@hasField(SYS, "rename")) {
         return syscall2(.rename, @intFromPtr(old), @intFromPtr(new));
     } else if (@hasField(SYS, "renameat")) {
-        return syscall4(.renameat, @as(usize, @bitCast(@as(isize, AT.FDCWD))), @intFromPtr(old), @as(usize, @bitCast(@as(isize, AT.FDCWD))), @intFromPtr(new));
+        return syscall4(
+            .renameat,
+            @as(usize, @bitCast(@as(isize, AT.FDCWD))),
+            @intFromPtr(old),
+            @as(usize, @bitCast(@as(isize, AT.FDCWD))),
+            @intFromPtr(new),
+        );
     } else {
-        return syscall5(.renameat2, @as(usize, @bitCast(@as(isize, AT.FDCWD))), @intFromPtr(old), @as(usize, @bitCast(@as(isize, AT.FDCWD))), @intFromPtr(new), 0);
+        return syscall5(
+            .renameat2,
+            @as(usize, @bitCast(@as(isize, AT.FDCWD))),
+            @intFromPtr(old),
+            @as(usize, @bitCast(@as(isize, AT.FDCWD))),
+            @intFromPtr(new),
+            0,
+        );
     }
 }
 
@@ -1373,14 +1395,14 @@ pub fn renameat(oldfd: i32, oldpath: [*:0]const u8, newfd: i32, newpath: [*:0]co
     }
 }
 
-pub fn renameat2(oldfd: i32, oldpath: [*:0]const u8, newfd: i32, newpath: [*:0]const u8, flags: u32) usize {
+pub fn renameat2(oldfd: i32, oldpath: [*:0]const u8, newfd: i32, newpath: [*:0]const u8, flags: RENAME) usize {
     return syscall5(
         .renameat2,
         @as(usize, @bitCast(@as(isize, oldfd))),
         @intFromPtr(oldpath),
         @as(usize, @bitCast(@as(isize, newfd))),
         @intFromPtr(newpath),
-        flags,
+        @as(u32, @bitCast(flags)),
     );
 }
 
diff --git a/lib/std/os/windows.zig b/lib/std/os/windows.zig
index f9768cf94c..52e4bd387d 100644
--- a/lib/std/os/windows.zig
+++ b/lib/std/os/windows.zig
@@ -3194,7 +3194,7 @@ pub const RenameError = error{
     NetworkNotFound,
     AntivirusInterference,
     BadPathName,
-    RenameAcrossMountPoints,
+    CrossDevice,
 } || UnexpectedError;
 
 pub fn RenameFile(
@@ -3295,7 +3295,7 @@ pub fn RenameFile(
         .ACCESS_DENIED => return error.AccessDenied,
         .OBJECT_NAME_NOT_FOUND => return error.FileNotFound,
         .OBJECT_PATH_NOT_FOUND => return error.FileNotFound,
-        .NOT_SAME_DEVICE => return error.RenameAcrossMountPoints,
+        .NOT_SAME_DEVICE => return error.CrossDevice,
         .OBJECT_NAME_COLLISION => return error.PathAlreadyExists,
         .DIRECTORY_NOT_EMPTY => return error.PathAlreadyExists,
         .FILE_IS_A_DIRECTORY => return error.IsDir,
diff --git a/lib/std/posix.zig b/lib/std/posix.zig
index fc59701225..60938818df 100644
--- a/lib/std/posix.zig
+++ b/lib/std/posix.zig
@@ -1594,7 +1594,7 @@ pub const FanotifyMarkError = error{
     NotDir,
     OperationUnsupported,
     PermissionDenied,
-    NotSameFileSystem,
+    CrossDevice,
     NameTooLong,
 } || UnexpectedError;
 
@@ -1634,7 +1634,7 @@ pub fn fanotify_markZ(
         .NOTDIR => return error.NotDir,
         .OPNOTSUPP => return error.OperationUnsupported,
         .PERM => return error.PermissionDenied,
-        .XDEV => return error.NotSameFileSystem,
+        .XDEV => return error.CrossDevice,
         else => |err| return unexpectedErrno(err),
     }
 }
diff --git a/src/Compilation.zig b/src/Compilation.zig
index bfd0193a26..5d369594c8 100644
--- a/src/Compilation.zig
+++ b/src/Compilation.zig
@@ -3460,7 +3460,7 @@ fn renameTmpIntoCache(
                 },
                 else => return error.AccessDenied,
             },
-            error.PathAlreadyExists => {
+            error.DirNotEmpty => {
                 try cache_directory.handle.deleteTree(io, o_sub_path);
                 continue;
             },
diff --git a/src/Package/Fetch.zig b/src/Package/Fetch.zig
index 5a7948f8e8..d42e441d77 100644
--- a/src/Package/Fetch.zig
+++ b/src/Package/Fetch.zig
@@ -1476,7 +1476,7 @@ pub fn renameTmpIntoCache(io: Io, cache_dir: Io.Dir, tmp_dir_sub_path: []const u
                 };
                 continue;
             },
-            error.PathAlreadyExists, error.AccessDenied => {
+            error.DirNotEmpty, error.AccessDenied => {
                 // Package has been already downloaded and may already be in use on the system.
                 cache_dir.deleteTree(io, tmp_dir_sub_path) catch {
                     // Garbage files leftover in zig-cache/tmp/ is, as they say