diff --git a/lib/std/Io/Threaded.zig b/lib/std/Io/Threaded.zig
index 1b6c97a127..9bdfbd489a 100644
--- a/lib/std/Io/Threaded.zig
+++ b/lib/std/Io/Threaded.zig
@@ -7545,7 +7545,6 @@ fn dirOpenDirWasi(
                     .NOMEM => return error.SystemResources,
                     .NOTDIR => return error.NotDir,
                     .PERM => return error.PermissionDenied,
-                    .BUSY => return error.DeviceBusy,
                     .NOTCAPABLE => return error.AccessDenied,
                     .ILSEQ => return error.BadPathName,
                     else => |err| return posix.unexpectedErrno(err),
@@ -14012,7 +14011,6 @@ fn windowsCreateProcessPathExt(
             error.NetworkNotFound,
             error.NameTooLong,
             error.BadPathName,
-            error.DeviceBusy,
             => return error.FileNotFound,
         };
     };
diff --git a/src/Builtin.zig b/src/Builtin.zig
index a097e88734..92a0e40ae3 100644
--- a/src/Builtin.zig
+++ b/src/Builtin.zig
@@ -343,10 +343,10 @@ pub fn updateFileOnDisk(file: *File, comp: *Compilation) !void {
     }
 
     // `make_path` matters because the dir hasn't actually been created yet.
-    var af = try root_dir.atomicFile(io, sub_path, .{ .make_path = true, .write_buffer = &.{} });
-    defer af.deinit();
-    try af.file_writer.interface.writeAll(file.source.?);
-    af.finish() catch |err| switch (err) {
+    var af = try root_dir.createFileAtomic(io, sub_path, .{ .make_path = true, .replace = true });
+    defer af.deinit(io);
+    try af.file.writeStreamingAll(io, file.source.?);
+    af.replace(io) catch |err| switch (err) {
         error.AccessDenied => switch (builtin.os.tag) {
             .windows => {
                 // Very likely happened due to another process or thread
diff --git a/src/Compilation.zig b/src/Compilation.zig
index 82f45ee9f0..957e0fadcf 100644
--- a/src/Compilation.zig
+++ b/src/Compilation.zig
@@ -3916,11 +3916,14 @@ pub fn saveState(comp: *Compilation) !void {
 
     // Using an atomic file prevents a crash or power failure from corrupting
     // the previous incremental compilation state.
+    var af = try lf.emit.root_dir.handle.createFileAtomic(io, basename, .{ .replace = true });
+    defer af.deinit(io);
+
     var write_buffer: [1024]u8 = undefined;
-    var af = try lf.emit.root_dir.handle.atomicFile(io, basename, .{ .write_buffer = &write_buffer });
-    defer af.deinit();
-    try af.file_writer.interface.writeVecAll(bufs.items);
-    try af.finish();
+    var file_writer = af.file.writer(io, &write_buffer);
+    try file_writer.interface.writeVecAll(bufs.items);
+    try file_writer.interface.flush();
+    try af.replace(io);
 }
 
 fn addBuf(list: *std.array_list.Managed([]const u8), buf: []const u8) void {
@@ -5244,26 +5247,31 @@ fn processOneJob(
     }
 }
 
-fn createDepFile(comp: *Compilation, depfile: []const u8, binfile: Cache.Path) anyerror!void {
+fn createDepFile(comp: *Compilation, dep_file: []const u8, bin_file: Cache.Path) anyerror!void {
     const io = comp.io;
+
+    var af = try Io.Dir.cwd().createFileAtomic(io, dep_file, .{ .replace = true });
+    defer af.deinit(io);
+
     var buf: [4096]u8 = undefined;
-    var af = try Io.Dir.cwd().atomicFile(io, depfile, .{ .write_buffer = &buf });
-    defer af.deinit();
+    var file_writer = af.file.writer(io, &buf);
 
-    comp.writeDepFile(binfile, &af.file_writer.interface) catch return af.file_writer.err.?;
-
-    try af.finish();
+    comp.writeDepFile(bin_file, &file_writer.interface) catch |err| switch (err) {
+        error.WriteFailed => return file_writer.err.?,
+    };
+    try file_writer.flush();
+    try af.replace(io);
 }
 
 fn writeDepFile(
     comp: *Compilation,
-    binfile: Cache.Path,
+    bin_file: Cache.Path,
     w: *std.Io.Writer,
 ) std.Io.Writer.Error!void {
     const prefixes = comp.cache_parent.prefixes();
     const fsi = comp.file_system_inputs.?.items;
 
-    try w.print("{f}:", .{binfile});
+    try w.print("{f}:", .{bin_file});
 
     {
         var it = std.mem.splitScalar(u8, fsi, 0);
diff --git a/src/fmt.zig b/src/fmt.zig
index b1903aad53..a3cd7c8d74 100644
--- a/src/fmt.zig
+++ b/src/fmt.zig
@@ -355,11 +355,11 @@ fn fmtPathFile(
         try fmt.stdout_writer.interface.print("{s}\n", .{file_path});
         fmt.any_error = true;
     } else {
-        var af = try dir.atomicFile(io, sub_path, .{ .permissions = stat.permissions, .write_buffer = &.{} });
-        defer af.deinit();
+        var af = try dir.createFileAtomic(io, sub_path, .{ .permissions = stat.permissions, .replace = true });
+        defer af.deinit(io);
 
-        try af.file_writer.interface.writeAll(fmt.out_buffer.written());
-        try af.finish();
+        try af.file.writeStreamingAll(io, fmt.out_buffer.written());
+        try af.replace(io);
         try fmt.stdout_writer.interface.print("{s}\n", .{file_path});
     }
 }